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Specifications
pvd vacuum coaters1,good abrasion resistance
2,Easy to operate
3,Nice after-service support
4,environment-protect
Configuration of machine
Part name | Specification | Supplier | Quantity | |
Chamber size | Ø1300mm×H1500mm | CICEL | 1set | |
Lining board | 1mm stainless steel | CICEL | 1set | |
Work piece steady | custom—made | CICEL | 1set | |
Rotation system | Frequency regulation | CICEL | 1set | |
Bias power supply | 30kw | GUANGDONG | 1set | |
arc power supply | 200A | GUANGDONG | 12sets | |
Ti target | Ø100 | CICEL | 12pcs | |
Flow value | D07—7C series | BEIJING | 4sets | |
Flow control instrument | D07—7C series | BEIJING | 1set | |
Gas—pressure gauge | international standard | CICEL | 1set | |
Vacuum measurement | ZDF—5227 | SICHUAN | 1set | |
Heating pipe | 9KW | CICEL | 12sets | |
valve | Main valve | GDQ—800 | CICEL | 1set |
Rough valve | GDQ—200 | CICEL | 1 set | |
Front valve | GDQ—150 | CICEL | 1 set | |
vacuum system | Diffusion pump | KT—800 | CICEL | 1set |
Mechanical pump | 2X—70 | SHANGHAI | 2sets | |
Roots pump | ZJY—600A | SHANGHAI | 1set | |
Holding pump | 2X—15 | SICHUAN | 1set | |
Electrical appliances | Standard equipment | Omron&Delixi | 1set | |
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