Vertical Chemical Vapor Deposition Furnace(SIC)

Product Description______________________________________________

Description
Vertical CVD tube furnace (Silicon Carbide) adopts methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.
 
Technical Features
1. The most advance control technology is adopted to control flow and pressure of MTS, realizing stable deposition airflow and small pressure fluctuation range.
2. Vacuum chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and great contamination protection performance. 
3. Multiple deposition channels assure flow field uniformity, non-deposition dead corner and great deposition surface.
4. It has treatment for the high corrosive tail gas, flammable and explosive gas, solid dust and low melting point sticky materials during the deposition process.
5. The new design anti corrosion vacuum unit ensures long continuous working hours and short maintainence time.

Optional Configuration of Vertical CVD Tube Furnace
1. Furnace door: screw elevation type/hydraulic elevation type/manual elevation, Manual tight/Auto lock-ring tight
2. Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
3. Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
4. Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
5. Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
6. Vacuum pump and gauge: Foreign brand/Chinese brand
7. HMI: Simulation screen/Touch screen/Industrial personal computer
8. PLC: OMRON/Siemens
9. Temperature controller: SHIMADEN/EUROTHERM
10. Thermocouple: C type, S type, K type, N type
11. Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
12. Electric components: CHINT/Schneider/Siemens

Specifications of Vertical CVD Tube Furnace

Company information______________________________________________

Founding in 2006, ACME (Advanced Corporation for Materials & Equipments) is a high-tech enterprise specialized in manufacture of industry heating equipment for new material and energy.  With an area of 100,000 m2 ,our annual production is over 200 sets. 

Customer Experience Center_______________________________________

ACME has a Customer Experience Center for customer to choose the suitable equipment and ensure the equipment performance meets the demand of production process requires. It helps ACME to acuumlate a wealth of experimental experience and greatly improving equipment relability and practicality.

Customers visiting ACME__________________________________________

ACME  has NO.1 maket share on special heating equipment ,sells to USA, Europe, Russia, Japan, Canada, New Zealand, Middle East, South America, Africa, South Asia and etc.areas and countries.

ACME in exhibitions__________________________________________

Why ACME?______________________________________________________

1.We are the manufacturer not a trade company! Warmly welcome to visit us in Changsha, China!

2.Our equipments are customized! Tell us your requirments and we can meet your needs !

3.ACME had gained Quality ,Environment and Occupation Health certificates of ISO 9001, ISO 14001 and ISO 18000. 

/

Aisha Liu

sales3@sinoacme.cn